Aktuelles, Preise und Auszeichnungen

  • 2021 Die Opti-Cal präsentiert sich im Format "Insights" auf der Webseite der Nanoscribe GmbH & Co KG, deren Technologie wir für die Fertigung unserer Normale verwenden.
  • 2020 Innovationspreis des Landes Rheinland-Pfalz in der Kategorie 3D Druck. Die Preisverleihung kann hier noch einmal angesehen werden.

Wissenschaftliche Publikationen

  1. M. Eifler, J. Hering, G. Bulun, G. von Freymann, J. Seewig: Determination of the characteristics of a self-built coherence scanning interferometer with a universal calibration artefact, Proc. SPIE 12223, Interferometry XXI, 122230A (2022); https://doi.org/10.1117/12.2633483
  2. N. Lang, S. Enns, J. Hering, and G. von Freymann, "Towards efficient structure prediction and pre-compensation in multi-photon lithography," Opt. Express 30, 28805-28816 (2022)
  3. Dai, G.; Hu, X.; Hering, J.; Eifler, M.; Seewig, J.; von Freymann, G.: Define and measure the dimensional accuracy of two-photon laser lithography based on its instrument transfer function, Journal of Physics: Photonics, 3(3), 2021, S. 034000
  4. Eifler, M.; Hering, J.; Keksel, A.; von Freymann, G.; Seewig, J.: Towards a continuous frequency band chirp material measure for surface topography measuring instrument calibration, Proc. SPIE Vol. 11782, Optical Measurement Systems for Industrial Inspection XII; 117820M, 2021
  5. Gross, K.; Eifler, M.; Hering, J.; von Freymann, G.; Seewig, J.: Metrological characteristics of material measures depending on manufacturing parameters in direct laser writing and external stress factors, Proc. SPIE Vol. 11782, Optical Measurement Systems for Industrial Inspection XII; 117820M, 2021 Bulun, G.; Eifler, M.; Hering, J.; von Freymann, G.; Seewig, J.: Performance specification of areal surface texture instruments exemplified by a self-built WLI, Proc. SPIE Vol. 11490, Interferometry XX; 114900H, 2020
  6. Eifler, M.; Hering, J.; Seewig, J.; Leach, R.K.; von Freymann, G.; Hu, X.; Dai, G.: Comparison of material measures for areal surface topography measuring instrument calibration, Surface Topography: Metrology and Properties, 8(2), 2020, S. 025019
  7. Eifler, M.; Ströer, F.; Hering, J.; von Freymann, G.; Seewig, J.: User-oriented evaluation of the metrological characteristics of areal surface topography measuring instruments, Proc. SPIE Vol. 11056Y, Optical Measurement Systems for Industrial Inspection XI; 11056Y, 2019.
  8. Eifler, M.; Hering, J.: Universalnormal zur Überprüfung metrologischer Eigenschaften – Eines für alle. Quality Engineering 01.2019, S. 36-37.
  9. Eifler, M.; Ströer, F.; Hering, J.; von Freymann, G.; Seewig, J.: User-oriented evaluation of the metrological characteristics of areal surface topography measuring instruments, Proc. SPIE Vol. 11056Y, Optical Measurement Systems for Industrial Inspection XI; 11056Y, 2019.
  10. Eifler, M.; Hering, J.: Universalnormal zur Überprüfung metrologischer Eigenschaften – Eines für alle. Quality Engineering 01.2019, S. 36-37.
  11. Eifler, M.; Hering, J.; Ströer, F.; Seewig, J.; von Freymann, G.: Flächenhafte Messgeräte mit nur einer Probe kalibrieren. Mikroproduktion 02/2018, S. 22-25.
  12. Seewig, J.; Eifler, M.; Bauer, W.: Praxisgerechte Kalibrierung nach ISO 25178-700 - Eine Übersicht. 2. VDI-Fachtagung Multisensorik in der Fertigungsmesstechnik 2018, VDI-Berichte 2326, S. 213-216.
  13. Eifler, M.; Hering, J.; von Freymann, G.; Seewig, J.: Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments. Optics Express, (26) 2018, 13, S. 16609-16623
  14. Eifler, M.; Hering, J.; von Freymann, G.; Seewig, J.: Manufacturing of the ISO 25178-70 material measures with direct laser writing: a feasibility study. Surface Topography: Metrology and Properties, (6) 2018, S. 024010
  15. Hering, J.; Eifler, M.; Hofherr, L.; Ziegler, C.; Seewig, J.; von Freymann G.: Two-photon laser lithography in optical metrology, Proc. SPIE Vol. 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 1054412, 2018.
  16. Ströer, F.; Hering, J.; Eifler, M.; Raid, I.; von Freymann, G.; Seewig, J.: Ultrafast 3D high precision print of micro structures for optical instrument calibration procedures, Additive Manufacturing (18), 2017, S. 22-30.
  17. Seewig, J.; Eifler, M.: Calibration of areal surface topography measuring instruments. Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 1044911, 2017.
  18. Eifler, M.; Seewig, J.; Hering, J.; von Freymann, G.: Calibration of z-axis linearity for arbitrary optical topography measuring instruments, Proceedings of SPIE 9525-163, Optical Measurement Systems for Industrial Inspection IX, 22.-25. Juni 2015, München