Wissenschaftliche Publikationen

  1. Eifler, M.; Ströer, F.; Hering, J.; von Freymann, G.; Seewig, J.: User-oriented evaluation of the metrological characteristics of areal surface topography measuring instruments, Proc. SPIE Vol. 11056Y, Optical Measurement Systems for Industrial Inspection XI; 11056Y, 2019.
  2. Eifler, M.; Hering, J.: Universalnormal zur Überprüfung metrologischer Eigenschaften – Eines für alle. Quality Engineering 01.2019, S. 36-37.

  3. Eifler, M.; Hering, J.; Ströer, F.; Seewig, J.; von Freymann, G.: Flächenhafte Messgeräte mit nur einer Probe kalibrieren. Mikroproduktion 02/2018, S. 22-25.
  4. Seewig, J.; Eifler, M.; Bauer, W.: Praxisgerechte Kalibrierung nach ISO 25178-700 - Eine Übersicht. 2. VDI-Fachtagung Multisensorik in der Fertigungsmesstechnik 2018, VDI-Berichte 2326, S. 213-216.
  5. Eifler, M.; Hering, J.; von Freymann, G.; Seewig, J.: Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments. Optics Express, (26) 2018, 13, S. 16609-16623
  6. Eifler, M.; Hering, J.; von Freymann, G.; Seewig, J.: Manufacturing of the ISO 25178-70 material measures with direct laser writing: a feasibility study. Surface Topography: Metrology and Properties, (6) 2018, S. 024010
  7. Hering, J.; Eifler, M.; Hofherr, L.; Ziegler, C.; Seewig, J.; von Freymann G.: Two-photon laser lithography in optical metrology, Proc. SPIE Vol. 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 1054412, 2018.

  8. Ströer, F.; Hering, J.; Eifler, M.; Raid, I.; von Freymann, G.; Seewig, J.: Ultrafast 3D high precision print of micro structures for optical instrument calibration procedures, Additive Manufacturing (18), 2017, S. 22-30.
  9. Seewig, J.; Eifler, M.: Calibration of areal surface topography measuring instruments. Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 1044911, 2017.

  10. Eifler, M.; Seewig, J.; Hering, J.; von Freymann, G.: Calibration of z-axis linearity for arbitrary optical topography measuring instruments, Proceedings of SPIE 9525-163, Optical Measurement Systems for Industrial Inspection IX, 22.-25. Juni 2015, München